Industrial Ultrasonic Spray Coater MAX

  • Ultrasonic spray coater capable of large area spray coating

  • Ultrasonic spray coater is equipped with optional multi-nozzles array for high production rate

  • Ultrasonic spray coater with double automatic in/out vacuum heating plates   

  • Ultrasonic spray coater with non-clogging ultrasonic nozzle technology reduces maintenance cost and down-time

  • Ultrasonic spray coater with continuous sonication liquid delivery system 

  • Ultrasonic spray coater with XYZ three-axis servo motion system and motion controller to optimize spray patterns


industrial ultrasonic coating system MAX fuel cell catalyst coatings  ultrasonic nozzle array

Industrial ultrasonic spray coater MAX is an ultrasonic spray coater for large area, which can be equipped with multiple WideMist ultrasonic nozzles in parallel to increase production rate. Industrial ultrasonic spray coater MAX is also able to equipped with double automatic vacuum heating platforms to achieve continuous production. The unique precision continuous metering pump system can realize stable liquid delivery in 24 hours. Configured with other auxiliary devices such as carrier gas control, heating plate, vacuum plate and exhaust system, industrial ultrasonic spray coater is very suitable for large area substrate and high-volume production. 

Ultrasonic spray coater which is a thin film layer deposition technique based on ultrasonic atomizing nozzle technology can deposit highly homogenous and controllable coating. Furthermore, since the atomization of ultrasonic spray coating is due to ultrasonic oscillation rather than the gas with high kinetic energy, ultrasonic spray coater significantly reduces the consumption of raw materials due to little overspray and splashing. The transfer efficiency of raw materials of ultrasonic spray coating is as high as 4 times of air spray coating.

Siansonic industrial ultrasonic spray coater MAX is used for various of applications on thin film coatings deposition such as catalyst coated membrane (CCM) for fuel cell, functional layers for thin-film solar cell, functional layers for biosensors and microfluidic chips, photoresist coatings for silicon wafers, anti-reflection (AR) coatings, hydrophilic coatings, hydrophobic coatings, thermal insulation coatings, transparent conductive coatings, etc.

Features of Siansonic industrial ultrasonic spray coater MAX:

  • Patented ultrasonic spray nozzle. (Optional Nozzles Available)

  • Digital ultrasonic generator: multi high-speed DSPs process, multi-closed-loop control with power precision in 0.01W.

  • Continuous liquid delivery system: capable of continuous liquid feeding for 24 hours

  • Uniformity: >95%

  • Thickness of coating: 20nm-100 micron (Depends on material) 

  • High transfer efficiency of coating material, usage ratio can be higher than 85%.

  • XYZ servo motion system

  • Ultrasonic spray coater equipped with high-performance motion controller, compared with traditional PLC, motion pattern of nozzle is optimized, and the utilization rate of raw materials is further improved.

  • Coating area: two automatic platforms with separated vacuum heating plates enable to achieve continuous coating process by alternately working. The maximum coating area of each platform is 650mm × 600mm.

  • Max liquid viscosity: 20-30 cps

  • Max solid particle size in suspensions: 10-20 micron 

  • Full-color touch screen and friendly user interface.

  • Ultrasonic dispersion system is optional for stirring of suspensions 

  • Precision air pressure control: keep carrier gas stable and adjustable

  • Exhaust system included



  • ConeMist, WideMist, FocusMist, NanoMist, LineMist, Penetrator and other series of Siansonic ultrasonic nozzles.

  • Multi-nozzles array: typically 4 WideMist nozzles 

  • Ultrasonic dispersion syringe: dispersing and stirring the suspension during liquid feeding to avoid agglomeration.

  • Heating plate for heating up substrates

  • Vacuum plate: fixing and flattening the flexible substrates such as membranes in fuel cell.


  • New energy: fuel cells, electrolysis, thin film solar cells, etc. 

  • Biomedical: functional coatings of microfluidic chips, biosensors

  • Electronics and semiconductors: photoresists, conductive inks, transparent conductive oxides, etc. 

  • Glass coating: AR anti-reflection, hydrophilic and hydrophobic coating, hard protective coating, etc. 


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