Megahertz ultra-high frequency ultrasound (also known as megasonic) has been verified and widely used in various semiconductor manufacturing processes, such as cleaning, chemical mechanical polishing, development, etching, lift-off, etc. with its extremely low cavitation effect and fine cavitation bubbles. Therefore, megasonic cleaning transducer and system have become one of the key components in semiconductor chip manufacturing equipment. Siansonic as a leading enterprise in applied ultrasonic technology in China, especially in high-frequency ultrasonic for liquid process, has decided to establish a complete set of megasonic product family to contribute to semiconductor manufacturing industry. With decades of technical accumulation in the field of megasonic and ultrasound, after in-depth study of the products and technologies of Japanese and American enterprises in semiconductor megasonic cleaning, after years of research, development and testing, our company has successfully broken through many technical difficulties, won a number of technical breakthroughs, obtained a number of patents, and is expected to officially release a series of products related to megasonic cleaning in the third quarter of this year (2022). During this period, a number of Chinese leading enterprises in the field of semiconductor manufacturing have approached our company, and some enterprises have carried out close cooperation, and will begin to realize the localization goal of some megasonic cleaning products as early as the second half of this year.
